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氮吹仪是整个光刻工艺中至关

点击次数:2031  发布日期:2016-11-29  【打印此页
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光 照的部分仍然保持为不溶性。   曝光氮吹仪德州牛仔是整个光刻工艺中至关重要的一步,对整个光刻的质量有直接的影响。 首先必须确定曝光光源的波长、强度以及曝光时间。因为每种光刻胶都只对特 定的频率范围的光照敏感,对其它频率的光照则不敏感,难以引发光化学反应。 而且各种光刻胶对于相应特征频率的光照的摩尔吸光度也是不同的。因而人们 必须根据各种光刻胶的感光范围和感光强度选定合适的曝光光源,再考虑到光 刻胶层的厚度、掩模板的厚薄以及曝光面积可确定曝光时间。曝光不足或曝光 过度都会使光刻精度降低甚至使整个光刻失败。除了曝光光源的波长、强度及 曝光时间以外,曝光工序操作过程中的某些工艺技术条件的控制也将影响到曝 光的结果和光刻的精度。这主要是:①掩模与光刻胶膜层的接触情况,如果光 刻胶膜在涂布时没有控制好,造成胶层厚薄不均匀,或表面不平整光洁,或表面 有微小尘粒玷污等,都会造成掩模与光刻胶表面接触不密合,不平行。这将


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