德州牛仔

全品类氮吹仪供应商:上海那艾精密仪器有限公司 24小时服务热线:021-5161 9676 
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氮吹仪价格蚀剂层中一部

点击次数:1946  发布日期:2016-11-29  【打印此页
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  经曝光后,光致抗氮吹仪价格德州牛仔蚀剂层中一部分发生了光交联或光降解,因而使其溶解性 发生了变化。选择适当的溶剂,把光刻胶层中可溶性部分溶解掉,使不溶性部分 保留下来,这就在光刻胶层上显示出了与掩模相应的图案,或者说把掩模上的图 案复制到了光致抗蚀剂层上来。这一步就称为显影,这是从普通照相术中引用 过来的术语。显影这步的关键在于选择适当的显影液、显影温度和显影时间。 这三个因素是彼此关联,相互影响的,而且随光刻胶的种类、特性及胶层的厚度 不同应有所改变的,一般需通过条件试验摸索出来。   显影以后需进行漂洗,把残留在胶层表面的显影液漂洗干净。良好的漂洗  第二讲 光刻技术和光致抗蚀剂399 还能消除在显影过程中光刻胶的溶胀和形变,从而改善成像的精度。   6.坚膜   经过显影后,不溶性的光刻胶部分虽然保留了下来,但由于显影液的浸泡而 变软,甚至有些溶胀和微小变形,胶层与基材间的粘着力也降低了。因而需要在 1


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